In many industrial and scientific applications, accurate vibration and motion measurement is essential. Whether monitoring a bridge’s structural integrity, a wind turbine’s foundation, or a precision machine tool, engineers rely on accelerometers to measure acceleration, shock, and vibration. Among the different technologies available today, MEMS accelerometers have become a leading solution thanks to their precision, robustness, and versatility.
What Is a MEMS Accelerometer?
MEMS stands for Micro Electro Mechanical Systems — miniaturized mechanical and electrical components built on a silicon substrate.
A MEMS accelerometer is a sensor that measures linear acceleration, gravity, and vibration using micro-machined mechanical structures integrated with electronic circuits.
In simple terms, it combines:
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a mechanical element that moves in response to acceleration,
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and an electrical circuit that converts this motion into an electrical signal.
These compact, solid-state devices can be found in everything from smartphones and drones to satellites and industrial monitoring systems.
How Does a MEMS Accelerometer Work?
The working principle of a MEMS accelerometer is based on mass displacement under acceleration. When a force acts on the sensor, a tiny proof mass (also called seismic mass) moves relative to the sensor’s frame. This movement changes a measurable physical quantity, usually capacitance or resistance, depending on the sensor type.
There are two main types of MEMS accelerometers:
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Capacitive MEMS Accelerometers
These use a series of micro-machined plates forming capacitors. When acceleration occurs, the gap between these plates changes, altering the capacitance value. The sensor’s electronics measure this change and translate it into an acceleration value.
→ This technology provides excellent noise performance at low frequencies and is ideal for static and quasi-static measurements.
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Piezoresistive MEMS Accelerometers
These rely on small resistors embedded in a deformable structure. As the structure bends under acceleration, the resistance changes proportionally to the applied force.
→ They are typically used in applications involving high shock or dynamic motion, as they are less sensitive to DC shifts.
Both technologies transform mechanical motion into an electrical signal, but capacitive MEMS accelerometers are particularly suited for low-frequency vibration monitoring — a key requirement in structural and civil engineering.
Why MEMS Technology Matters in Industrial Vibration Monitoring
In industrial environments, vibration monitoring often involves harsh conditions: high humidity, temperature variations, electromagnetic interference, and long cable distances. Traditional laboratory accelerometers, while precise, are often too fragile or expensive for such use.
This is where MEMS accelerometers like Micromega Dynamics’ Recovib® accelerometers make a difference.
They bridge the gap between laboratory-grade precision and industrial robustness.
Key Advantages of MEMS Accelerometers
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Wide Frequency Range – From DC to high frequencies, enabling both structural monitoring and dynamic machine control.
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Low Noise Floor – Ensures stable, accurate readings even for low-frequency phenomena.
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Multiple Output Options – Voltage, differential voltage, or 4–20 mA current loop for long-distance signal transmission.
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Galvanic Isolation – Prevents interference and signal degradation across large installations.
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High Protection (IP67) – Resistant to dust, moisture, and demanding field conditions.
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Robust Materials – Stainless steel or aluminum housings for long-term reliability.
These features make MEMS accelerometers suitable for a wide variety of industries — from transportation and energy to civil engineering, semiconductor manufacturing, and astronomy.
Internal Signal Conditioning and Data Integrity
Unlike simple sensors that require external signal conditioning, Recovib® accelerometers integrate this functionality directly into the sensor.
This internal conditioning ensures:
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stable amplification and filtering of vibration signals,
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minimal external interference,
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and reliable transmission even over cable lengths exceeding 150 m.
In electrically noisy industrial environments, this integration guarantees signal integrity and repeatable accuracy — essential for engineers who depend on data-driven decision-making.
MEMS vs. Other Accelerometer Technologies
Compared to piezoelectric or capacitive non-MEMS accelerometers, MEMS designs offer several strategic advantages:
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They can measure static or very low-frequency accelerations, even close to 0 Hz (DC).
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They are cost-effective while maintaining a flat frequency response.
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They allow miniaturization and easy integration with electronic systems and data platforms.
In short, MEMS accelerometers deliver an excellent compromise between performance, durability, and affordability — which explains their widespread adoption across industries.
Learn more about MEMS vs Piezoelectric Accelerometers.
Practical Applications
MEMS accelerometers are used wherever vibration or motion must be monitored, controlled, or analyzed. Typical examples include:
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Monitoring vibration near sensitive structures (hospitals, museums, historic monuments).
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Structural health monitoring in bridges, tunnels, and buildings.
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Condition monitoring for pumps, turbines, and rotating machinery.
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Vibration analysis in marine, railway, and aerospace systems.
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Precision monitoring in semiconductor fabrication or astronomy instruments.
In these contexts, devices like the Recovib® MEMS accelerometers enable engineers to measure and interpret vibration data with confidence — even in challenging environments.
In summary, a MEMS accelerometer is a compact, robust, and precise sensor capable of measuring acceleration across a wide range of frequencies.
For industrial vibration monitoring and low-frequency applications, capacitive MEMS technology stands out as the optimal choice — combining accuracy, reliability, and cost-efficiency.
