What we do
- Smart sensors for vibration measurements
- Vibration Problem analysis
- Passive damping devices
- Active Damping Devices
- Custom design of actuators and controllers for perfect integration into customers’ machines or processes (mechanical layout and interfaces, environment etc.)
- Quick and easy vibration measurements
- Increased structural damping
- Reduced settling time
- Reduced dynamic amplifications at resonance frequencies
Semiconductor inspection machine performance measurements
Micromega Recovib.Feel® USB vibration recorder and the operator smartphone can be very helpful in special environments such as clean rooms because of their easy use. Indeed, inspection machines for the semiconductor industry are subject to increasingly stringent precision requirements while being required to go faster to increase the production rate. With that in mind, it is necessary that the machine dynamics exhibit specified structural characteristics (resonance frequency, structural damping etc.) that depend on the machine design but also on the machine boundary conditions.
These characteristics can be obtained with a dedicated professional setup, such as accelerometers, sensors, conditioning units and dynamic signal analyzers. However, their use in a clean room environment can be clumsy (sensor mounting, cabling etc.). In a recent mission, the Micromega Recovib.Feel® USB recorder and the related vibration analysis app were used to characterize the machine dynamics. The sensor, equipped with magnets, is easily installed on the machine and connected either to a smartphone or a PC.
Semiconductor inspection machine settling time improvement
A semiconductor inspection device is equipped with a high-end isolation platform that prevents ground vibrations to degrade imaging performance. However, the scanning mechanisms excite local resonances of the machine. These must be damped to both improve vibration levels and reduce the settling time and therefore to increase the machine inspection speed. An active damping device was used to increase the machine structural damping (up to 15%) which significantly improved the machine performance.
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