Semiconductor industry

Highly precise and very sensitive equipment, such as microscopes, inspection devices, imaging systems and polishing machines usually use an active or passive isolation platform. In some situations, this is not enough to keep the vibration levels low enough. It may be that local/global resonances are degrading the performance of the isolation system, because it is not stiff enough or because perturbation sources are located on the isolated part.

What we do





  • Quick and easy vibration measurements
  • Increased structural damping
  • Reduced settling time
  • Reduced dynamic amplifications at resonance frequencies



Semiconductor inspection machine performance measurements

Micromega Recovib.Feel® USB vibration recorder and the operator smartphone can be very helpful in special environments such as clean rooms because of their easy use. Indeed, inspection machines for the semiconductor industry are subject to increasingly stringent precision requirements while being required to go faster to increase the production rate. With that in mind, it is necessary that the machine dynamics exhibit specified structural characteristics (resonance frequency, structural damping etc.) that depend on the machine design but also on the machine boundary conditions.

These characteristics can be obtained with a dedicated professional setup, such as accelerometers, sensors, conditioning units and dynamic signal analyzers. However, their use in a clean room environment can be clumsy (sensor mounting, cabling etc.). In a recent mission, the Micromega Recovib.Feel® USB recorder and the related vibration analysis app were used to characterize the machine dynamics. The sensor, equipped with magnets, is easily installed on the machine and connected either to a smartphone or a PC.

Semiconductor inspection machine settling time improvement

A semiconductor inspection device is equipped with a high-end isolation platform that prevents ground vibrations to degrade imaging performance. However, the scanning mechanisms excite local resonances of the machine. These must be damped to both improve vibration levels and reduce the settling time and therefore to increase the machine inspection speed. An active damping device was used to increase the machine structural damping (up to 15%) which significantly improved the machine performance.

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