Micromega Recovib.Feel® USB vibration recorder and the operator smartphone can be very helpful in special environments such as clean rooms because of their easy use. Indeed, inspection machines for the semiconductor industry are subject to increasingly stringent precision requirements while being required to go faster to increase the production rate. With that in mind, it is necessary that the machine dynamics exhibit specified structural characteristics (resonance frequency, structural damping etc.) that depend on the machine design but also on the machine boundary conditions.
These characteristics can be obtained with a dedicated professional setup, such as accelerometers, sensors, conditioning units and dynamic signal analyzers. However, their use in a clean room environment can be clumsy (sensor mounting, cabling etc.). In a recent mission, the Micromega Recovib.Feel® USB recorder and the related vibration analysis app were used to characterize the machine dynamics. The sensor, equipped with magnets, is easily installed on the machine and connected either to a smartphone or a PC.